Concepedia
Statistics
Publications
5
Citations
155
H-Index
Active since
2008
Affiliations
Akademie Mode & Design(Current)
IBM (United States)
Toshiba (United States)
Laser- und Medizin-Technologie (Germany)
Advanced Micro Devices (United States)
Anna Tchikoulaeva is an author at Akademie Mode & Design specializing in engineering, manufacturing engineering, and electrical engineering.
Publications per year
2008–2020
Integration of EUV lithography in the fabrication of 22-nm node devices
Obert R. Wood, Chiew-Seng Koay, Karen Petrillo et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 51 citations · Full text
Engineering, Electrical Engineering, Materials Science +16
The use of EUV lithography to produce demonstration devices
Bruno LaFontaine, Yunfei Deng, Ryoung-Han Kim et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 42 citations
Engineering, Electrical Engineering, Manufacturing Engineering +15
EUV actinic blank inspection: from prototype to production
Anna Tchikoulaeva, Hiroki Miyai, Tomohiro Suzuki et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 38 citations
Engineering, Manufacturing Engineering, Metrology +9
ACLV degradation: root cause analysis and effective monitoring strategy
Anna Tchikoulaeva, Andre Holfeld, Markus Arend et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 12 citations
Engineering, Electrical Engineering, Materials Science +17
Enabling EUVL high-volume manufacturing with actinic patterned mask inspection
Anna Tchikoulaeva, Hiroki Miyai, Tsunehito Kohyama et al. · 2020 · 12 citations
Engineering, Manufacturing Engineering, Materials Engineering +13
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