Statistics
Publications
2
Citations
32
H-Index
2
Active since
2019
Affiliations
Tsunehito Kohyama is an author at Laser- und Medizin-Technologie (Germany) specializing in mask defect detection, industrial inspection, and inspection.
Publications per year
2019–2020
2
2
Actinic patterned mask defect inspection for EUV lithography
Hiroki Miyai, Tsunehito Kohyama, Tomohiro Suzuki et al. · 2019 · 20 citations · Full text
Engineering, Manufacturing Engineering, Materials Engineering +13
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