Concepedia

Hiroki Miyai

HM

Statistics

Publications

5

Citations

109

H-Index

5

Active since

2012

Affiliations

Laser- und Medizin-Technologie (Germany)(Current)

Hiroki Miyai is an author at Laser- und Medizin-Technologie (Germany) specializing in inspection, engineering, and mask inspection.

Publications per year

2012–2020

5

Publications

5

EUV actinic blank inspection: from prototype to production

Anna Tchikoulaeva, Hiroki Miyai, Tomohiro Suzuki et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 38 citations

Engineering, Manufacturing Engineering, Metrology +9

The capability of high magnification review function for EUV actinic blank inspection tool

Hiroki Miyai, Tomohiro Suzuki, Kiwamu Takehisa et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 26 citations

Engineering, Manufacturing Engineering, Materials Science +16

Actinic patterned mask defect inspection for EUV lithography

Hiroki Miyai, Tsunehito Kohyama, Tomohiro Suzuki et al. · 2019 · 20 citations · Full text

Engineering, Manufacturing Engineering, Materials Engineering +13

EUV actinic blank inspection tool with a high magnification review mode

Tomohiro Suzuki, Hiroki Miyai, Kiwamu Takehisa et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 13 citations

Engineering, Materials Engineering, Materials Science +14

Enabling EUVL high-volume manufacturing with actinic patterned mask inspection

Anna Tchikoulaeva, Hiroki Miyai, Tsunehito Kohyama et al. · 2020 · 12 citations

Engineering, Manufacturing Engineering, Materials Engineering +13

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