Concepedia

Kiwamu Takehisa

KT

6

Publications

121

Citations

6

H-Index

1992

Active since

Affiliations

Laser- und Medizin-Technologie (Germany)(Current)

Kiwamu Takehisa is an author at Laser- und Medizin-Technologie (Germany) specializing in engineering, instrumentation, and calibration.

Top concepts

Publications per year

1992–2020

6

Publications

6

EUV actinic blank inspection: from prototype to production

Anna Tchikoulaeva, Hiroki Miyai, Tomohiro Suzuki et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 38 citations

, , +10

The capability of high magnification review function for EUV actinic blank inspection tool

Hiroki Miyai, Tomohiro Suzuki, Kiwamu Takehisa et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 26 citations

, , +19

Actinic patterned mask defect inspection for EUV lithography

Hiroki Miyai, Tsunehito Kohyama, Tomohiro Suzuki et al. · 2019 · 20 citations · Full text

EUV actinic blank inspection tool with a high magnification review mode

Tomohiro Suzuki, Hiroki Miyai, Kiwamu Takehisa et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 13 citations

, , +14

Method for pumping a Ti:sapphire laser with a stable resonator copper vapor laser

Kiwamu Takehisa, A. Miki · Applied Optics · 1992 · 12 citations

, , +13

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