Kiwamu Takehisa - Concepedia

Author

Kiwamu Takehisa

Also Known As

K. Takehisa, Kiwamu Takehisa

Publications

203

Citations

H-Index

Concepts

All Affiliations

Kiwamu Takehisa is an author at Laser- und Medizin-Technologie (Germany) specializing in engineering, instrumentation, and calibration.

#	Concept	H-Index	Publications	Citations
1	Engineering	4	4	89
2	Applied Physics	3	3	51
3	Computer Engineering	2	2	64
4	Health Sciences	1	1	26
5	Electrical Engineering	1	1	26

Kiwamu Takehisa

Publications

121

Citations

H-Index

Page 1

	Year	Citations
EUV actinic blank inspection: from prototype to production Anna Tchikoulaeva, Hiroki Miyai, Tomohiro Suzuki, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Actinic Metrology ToolsEngineeringInspectionNondestructive TestingElectron-beam Lithography	2013	38
The capability of high magnification review function for EUV actinic blank inspection tool Hiroki Miyai, Tomohiro Suzuki, Kiwamu Takehisa, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE EngineeringBlank Inspection ToolsElectron-beam LithographyDefect ToleranceImage Analysis	2013	26
Actinic patterned mask defect inspection for EUV lithography Hiroki Miyai, Tsunehito Kohyama, Tomohiro Suzuki,	2019	20
EUV actinic blank inspection tool with a high magnification review mode Tomohiro Suzuki, Hiroki Miyai, Kiwamu Takehisa, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Adaptive OpticHigh AccuracyPattern ShiftEngineeringElectron-beam Lithography	2012	13
Method for pumping a Ti:sapphire laser with a stable resonator copper vapor laser Kiwamu Takehisa, A. Miki Applied Optics Optical PumpingPhotonicsAdvanced Laser ProcessingEngineeringLaser Science	1992	12
Enabling EUVL high-volume manufacturing with actinic patterned mask inspection Anna Tchikoulaeva, Hiroki Miyai, Tsunehito Kohyama,	2020	12

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