Transparent ZnO:Al films prepared by co-sputtering of ZnO:Al with either a Zn or an Al target - Concepedia

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Transparent ZnO:Al films prepared by co-sputtering of ZnO:Al with either a Zn or an Al target

47

Citations

6

References

1996

Year

Kikuo Tominaga, Masahiro Kataoka, Haruhiko Manabe, Tetsuya Ueda, Ichiro Mori

Thin Solid Films

Materials ScienceMaterials EngineeringAluminium NitrideEngineeringOxide ElectronicsSurface ScienceApplied PhysicsAl FilmsThin FilmsChemical DepositionTransparent ZnoThin Film ProcessingAl Target

References

	Year	Citations

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