Concepedia

Preparation of conductive ZnO:Al films by a facing target system with a strong magnetic field

Kikuo Tominaga, Masahiro Kataoka, Tetsuya Ueda, Munfei Chong Munfei Chong, Yoshihiro Shintani, Ichiro Mori

Thin Solid Films · 1994 · 38 citations · 7 references

DOI

Concepts

References

7

Highly Conductive and Transparent Aluminum Doped Zinc Oxide Thin Films Prepared by RF Magnetron Sputtering

Tadatsugu Minami, Hidehito Nanto, Shinzo Takata · Japanese Journal of Applied Physics · 1984 · 548 citations

, , +17

Group III Impurity Doped Zinc Oxide Thin Films Prepared by RF Magnetron Sputtering

Tadatsugu Minami, Hirotoshi Sato, Hidehito Nanto et al. · Japanese Journal of Applied Physics · 1985 · 546 citations

, , +17

Unbalanced dc magnetrons as sources of high ion fluxes

B. Window, N. Savvides · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1986 · 208 citations

, , +15

Optical Properties of Aluminum Doped Zinc Oxide Thin Films Prepared by RF Magnetron Sputtering

Tadatsugu Minami, Hidehito Nanto, Shinzo Takata · Japanese Journal of Applied Physics · 1985 · 152 citations

, , +17

Substrate temperature dependence of electrical properties of ZnO:Al epitaxial films on sapphire (1210)

Yasuhiro Igasaki, Hiromi Saito · Journal of Applied Physics · 1991 · 144 citations

, , +17