Preparation of conductive ZnO:Al films by a facing target system with a strong magnetic field - Concepedia

Concepedia

Publication | Closed Access

Preparation of conductive ZnO:Al films by a facing target system with a strong magnetic field

38

Citations

7

References

1994

Year

Kikuo Tominaga, Masahiro Kataoka, Tetsuya Ueda, Munfei Chong Munfei Chong, Yoshihiro Shintani, Ichiro Mori

Thin Solid Films

Materials ScienceMagnetismAluminium NitrideEngineeringNanotechnologyFacing Target SystemOxide ElectronicsApplied PhysicsAl FilmsThin FilmsConductive Zno

References

	Year	Citations

Page 1