Concepedia

Toshiei Kurosaki

TK

3

Publications

97

Citations

3

H-Index

1987

Active since

Affiliations

Hitachi (Japan)(Current)

Toshiei Kurosaki is an author at Hitachi (Japan) specializing in instrumentation, computational optical imaging, and optical metrology.

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Publications per year

1987–1990

3

Publications

3

0.3-micron Optical Lithography Using A Phase-Shifting Mask

Tsuneo Terasawa, Norio Hasegawa, Toshiei Kurosaki et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1989 · 69 citations

Improved resolution of an <i>i</i>-line stepper using a phase-shifting mask

Tsuneo Terasawa, Norio Hasegawa, Toshihiko Tanaka et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1990 · 18 citations

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Contrast improvement of alignment signals from resist coated patterns

Shinji Kuniyoshi, Tsuneo Terasawa, Toshiei Kurosaki et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1987 · 10 citations

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