Concepedia

Roy Hallstein

RH

3

Publications

206

Citations

3

H-Index

2008

Active since

Affiliations

Intel (United States)(Current)

Carl Zeiss (United States)

Roy Hallstein is an author at Intel (United States) specializing in materials science, engineering, and microelectronics.

Top concepts

Publications per year

2008–2011

3

Publications

3

Integrated on-chip inductors using magnetic material (invited)

Donald S. Gardner, G. Schrom, P. Hazucha et al. · Journal of Applied Physics · 2008 · 114 citations

, , +16

The neon gas field ion source—a first characterization of neon nanomachining properties

Richard H. Livengood, Shida Tan, Roy Hallstein et al. · Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated Equipment · 2011 · 50 citations

, , +7

Nanomachining with a focused neon beam: A preliminary investigation for semiconductor circuit editing and failure analysis

Shida Tan, Richard H. Livengood, P. Hack et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2011 · 42 citations

, , +20

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