Modeling and process design of III-nitride MOVPE at near-atmospheric pressure in close coupled showerhead and planetary reactors - Concepedia

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Modeling and process design of III-nitride MOVPE at near-atmospheric pressure in close coupled showerhead and planetary reactors

45

Citations

15

References

2006

Year

M. Dauelsberg, Conor Martin, H. Protzmann, Adam R. Boyd, E. J. Thrush, J. Käppeler, M. Heuken, E.V. Yakovlev, A.V. Kondratyev

Journal of Crystal Growth

Chemical EngineeringEngineeringPlanetary ReactorsApplied PhysicsIii-nitride MovpeNear-atmospheric PressureThermodynamicsHydrogenMultiphase FlowGas-liquid FlowChemical Kinetics

References

	Year	Citations

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