M. Dauelsberg

Modeling and process design of III-nitride MOVPE at near-atmospheric pressure in close coupled showerhead and planetary reactors

M. Dauelsberg, Conor Martin, H. Protzmann et al. · Journal of Crystal Growth · 2006 · 45 citations

Chemical Engineering, Engineering, Planetary Reactors +8

Heat transfer and mass transport in a multiwafer MOVPE reactor: modelling and experimental studies

T. Bergunde, M. Dauelsberg, L. Kadinski et al. · Journal of Crystal Growth · 1997 · 34 citations

Radiative Heat Transfer, Mass Transport, Electrical Engineering +11

Modeling and experimental verification of deposition behavior during AlGaAs growth: a comparison for the carrier gases N2 and H2

M. Dauelsberg, H. Hardtdegen, L. Kadinski et al. · Journal of Crystal Growth · 2001 · 34 citations

Aluminium Nitride, Engineering, Carrier Gases N2 +5

Process optimisation of MOVPE growth by numerical modelling of transport phenomena including thermal radiation

T. Bergunde, M. Dauelsberg, L. Kadinski et al. · Journal of Crystal Growth · 1997 · 25 citations

Radiative Heat Transfer, Engineering, Thermal Radiation +16

Modeling and experimental verification of transport and deposition behavior during MOVPE of Ga1-xInxP in the Planetary Reactor

M. Dauelsberg, L. Kadinski, Yu.N. Makarov et al. · Journal of Crystal Growth · 2000 · 21 citations

Materials Science, Experimental Verification, Engineering +8