Concepedia

Three-dimensional rotor fabrication by focused-ion-beam chemical-vapor-deposition

Jun-ya Igaki, Reo Kometani, Ken-ichiro Nakamatsu, Kazuhiro Kanda, Yuichi Haruyama, Yukinori Ochiai, Jun‐ichi Fujita, Takashi Kaito, Shinji Matsui

Microelectronic Engineering · 2006 · 36 citations · 4 references

DOI

Concepts

References

4

Three-dimensional nanostructure fabrication by focused-ion-beam chemical vapor deposition

Shinji Matsui, Takashi Kaito, Jun‐ichi Fujita et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 432 citations

, , +17

Free-space-wiring fabrication in nano-space by focused-ion-beam chemical vapor deposition

T. Morita, Reo Kometani, Keiichiro Watanabe et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 124 citations

, , +16

Observation and characteristics of mechanical vibration in three-dimensional nanostructures and pillars grown by focused ion beam chemical vapor deposition

Jun‐ichi Fujita, M. Ishida, Toshitsugu Sakamoto et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 104 citations

, , +15

Nanomanipulator and actuator fabrication on glass capillary by focused-ion-beam-chemical vapor deposition

Reo Kometani, T. Morita, Keiichiro Watanabe et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2004 · 75 citations

, , +14