Jun-ya Igaki

NEXAFS study on carbon-based material formed by focused-ion-beam chemical-vapor-deposition

Kazuhiro Kanda, Jun-ya Igaki, Yuri Kato et al. · Radiation Physics and Chemistry · 2006 · 39 citations

Natural Sciences, Materials Engineering, Materials Science +8

Three-dimensional rotor fabrication by focused-ion-beam chemical-vapor-deposition

Jun-ya Igaki, Reo Kometani, Ken-ichiro Nakamatsu et al. · Microelectronic Engineering · 2006 · 36 citations

Engineering, Manufacturing Engineering, Materials Science +12

Mechanical characteristics and applications of diamondlike-carbon cantilevers fabricated by focused-ion-beam chemical vapor deposition

Jun-ya Igaki, Ken-ichiro Nakamatsu, Reo Kometani et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2006 · 36 citations

Engineering, Materials Engineering, Materials Science +17

Comparison of FIB-CVD and EB-CVD growth characteristics

Jun-ya Igaki, Kazuhiro Kanda, Yuichi Haruyama et al. · Microelectronic Engineering · 2006 · 33 citations

Business, Materials Engineering, Growth Strategy +2

Mechanical characteristics and its annealing effect of diamondlike-carbon nanosprings fabricated by focused-ion-beam chemical vapor deposition

Ken-ichiro Nakamatsu, Masao Nagase, Jun-ya Igaki et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2005 · 25 citations

Natural Sciences, Materials Engineering, Materials Science +17