Radiation Physics and Chemistry · 2006 · 39 citations · 11 references
Natural SciencesMaterials EngineeringMaterials ScienceFunctional MaterialsMaterials ChemistryNanomaterialsCarbon NanomaterialsChemical Vapor DepositionCarbon-based NanomaterialsChemical Vapor Deposition MaterialsChemical Vapor Deposition Precursors
11
Free-space-wiring fabrication in nano-space by focused-ion-beam chemical vapor deposition
T. Morita, Reo Kometani, Keiichiro Watanabe et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 124 citations
Natural Sciences, Materials Engineering, Materials Science +16