Micro-focus double-crystal X-ray diffractometry on IIl-V heterostructures grown by selective-area epitaxy

Abstract

Some Ill-V heterostructures grown by selective area MOMBE and MOVPE were investigated by double-crystal diffractometry with high spatial resolution. The high spatial resolution was achieved using synchrotron radiation focused by one-dimensional Bragg-Fresnel X-ray optics to a line focus of 2 mu m width. The lattice mismatch close to growth/non-growth boundaries was investigated by performing rocking curve scans with micrometre step width across the lateral transition zones. The rocking curves reveal material variations at the boundaries in the range of 100 mu m for MOVPE to below 6 mu m for MOMBE.