A novel focused-ion-beam lithography process for sub-100 nanometer technology nodes

Focused ion beam technology and applications

J. Melngailis · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1987 · 611 citations

Engineering, Materials Science, Physics +11

Nanofabrication by FIB

Kenji Gamo · Microelectronic Engineering · 1996 · 62 citations

Ion bombardment of resists

I. Adesida · Nuclear Instruments and Methods in Physics Research · 1983 · 45 citations

Natural Sciences, Physics, Nuclear Physics +1

Focused ion beam lithography and its application to submicron devices

Hiroaki Morimoto, Yōichi Sasaki, Kazunori Saitoh et al. · Microelectronic Engineering · 1986 · 40 citations

Engineering, Materials Science, Physics +10

Surface imaging of focused ion-beam exposed resists

Mark A. Hartney, David C. Shaver, M. I. Shepard et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1991 · 18 citations

Engineering, Materials Engineering, Materials Science +13