Concepedia

M. I. Shepard

MI

Statistics

Publications

6

Citations

87

H-Index

6

Active since

1988

Affiliations

Massachusetts Institute of Technology(Current)

MIT Lincoln Laboratory

M. I. Shepard is an author at Massachusetts Institute of Technology specializing in engineering, applied physics, and microelectronics.

Top concepts

EngineeringApplied PhysicsMicroscopyMaterial ScienceMicroelectronicsMicrofabricationIntegrated CircuitsX-ray ImagingInstrumentationNanofabrication

Publications per year

1988–1991

6

Publications

6

Surface imaging of focused ion-beam exposed resists

Mark A. Hartney, David C. Shaver, M. I. Shepard et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1991 · 18 citations

Materials Science, Silylation Processes, Entire Resist Thickness +15

Sub-100-nm x-ray mask technology using focused-ion-beam lithography

Anthony Yen, K. Ismail, M. I. Shepard et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1989 · 17 citations

Focused-ion-beam Lithography, Engineering, Electron-beam Lithography +19

A tunable-frequency Gunn diode fabricated by focused ion-beam implantation

Henri J. Lezec, K. Ismail, L.J. Mahoney et al. · IEEE Electron Device Letters · 1988 · 15 citations

Electrical Engineering, Focused Ion-beam Implantation, Engineering +13

Focused ion beam lithography

J. S. Huh, M. I. Shepard, J. Melngailis · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1991 · 14 citations

Ion Beam Lithography, Engineering, Electron-beam Lithography +16

Fabrication and testing of 0.1-μm-linewidth microgap x-ray masks

Mark L. Schattenburg, K. Early, Y. Ku et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1990 · 13 citations

Engineering, Electron-beam Lithography, Microscopy +23

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