Concepedia

Anthony Yen

AY

27

Publications

770

Citations

14

H-Index

1989

Active since

Affiliations

Massachusetts Institute of Technology(Current)

EIC Laboratories

Taiwan Semiconductor Manufacturing Company (Taiwan)

ASML (Netherlands)

IMEC

Anthony Yen is an author at Massachusetts Institute of Technology specializing in applied physics, engineering, and optical properties.

Top concepts

EngineeringApplied PhysicsOptical PropertiesPhysicsMicrofabricationOptical MaterialsMaterial ScienceOptoelectronicsMicroscopyPhotonics

Publications per year

1989–2022

27

Publications

27

An experimentally validated analytical model for gate line-edge roughness (LER) effects on technology scaling

C.H. Diaz, Hun-Jan Tao, Yao-Ching Ku et al. · IEEE Electron Device Letters · 2001 · 148 citations

Device Modeling, Electrical Engineering, Gate Length +15

Negative transconductance and negative differential resistance in a grid-gate modulation-doped field-effect transistor

K. Ismail, W. K. Chu, Anthony Yen et al. · Applied Physics Letters · 1989 · 102 citations

Device Modeling, Semiconductors, Electrical Engineering +15

Optical projection lithography using lenses with numerical apertures greater than unity

Hiroaki Kawata, James M. Carter, Anthony Yen et al. · Microelectronic Engineering · 1989 · 55 citations

Optical Design, Photonics, Optical Materials +12

EUV Lithography Technology for High-volume Production of Semiconductor Devices

Junji Miyazaki, Anthony Yen · Journal of Photopolymer Science and Technology · 2019 · 50 citations · Full text

Matched-machine Overlay, Electrical Engineering, Wafer Scale Processing +12

Achromatic holographic configuration for 100-nm-period lithography

Anthony Yen, Erik H. Anderson, Reza Ghanbari et al. · Applied Optics · 1992 · 45 citations

Photonics, Holography, Engineering +13

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