Anthony Yen - Concepedia

Author

Anthony Yen

Massachusetts Institute of Technology

Also Known As

A. C. Yen, A. Yen, A.C. Yen, An-Ru Yen, Anthony Yen

153

Publications

Citations

H-Index

103

Concepts

All Affiliations

Massachusetts Institute of Technology EIC Laboratories Taiwan Semiconductor Manufacturing Company (Taiwan)ASML (Netherlands)IMEC

About

Anthony Yen is an author at Massachusetts Institute of Technology specializing in applied physics, engineering, and optical properties.

Top Concepts

#	Concept	H-Index	Publications	Citations
1	Engineering	14	24	718
2	Natural Sciences	3	3	41
3	Health Sciences	2	2	23
4	Medicine	2	2	69
5	Social Sciences	1	1	29

Anthony Yen

Publications

770

Citations

H-Index

Page 1

	Year	Citations
An experimentally validated analytical model for gate line-edge roughness (LER) effects on technology scaling C.H. Diaz, Hun-Jan Tao, Yao-Ching Ku, IEEE Electron Device Letters Device ModelingElectrical EngineeringGate LengthEngineeringSemiconductor Device	2001	148
Negative transconductance and negative differential resistance in a grid-gate modulation-doped field-effect transistor K. Ismail, W. K. Chu, Anthony Yen, Applied Physics Letters Device ModelingSemiconductorsElectrical EngineeringSemiconductor TechnologyEngineering	1989	102
Optical projection lithography using lenses with numerical apertures greater than unity Hiroaki Kawata, James M. Carter, Anthony Yen, Microelectronic Engineering Optical DesignPhotonicsOptical MaterialsEngineeringOphthalmology	1989	55
EUV Lithography Technology for High-volume Production of Semiconductor Devices Junji Miyazaki, Anthony Yen Journal of Photopolymer Science and Technology Matched-machine OverlayElectrical EngineeringWafer Scale ProcessingEngineeringElectron-beam Lithography	2019	50
Achromatic holographic configuration for 100-nm-period lithography Anthony Yen, Erik H. Anderson, Reza Ghanbari, Applied Optics PhotonicsHolographyEngineeringBeam LithographyPhysics	1992	45
Determining thin film properties by fitting optical transmittance James D. Klein, Anthony Yen, Stuart F. Cogan Journal of Applied Physics Materials ScienceOptical MaterialsInterference Fringe BehaviorEngineeringOptical Properties	1990	43
An Anti‐Reflection Coating for Use with PMMA at 193 nm Anthony Yen, Henry I. Smith, Mark L. Schattenburg, Journal of The Electrochemical Society Optical MaterialsEngineeringElectron-beam LithographyOptical CoatingsLaser Applications	1992	29
Illuminator design for the printing of regular contact patterns Martin Burkhardt, Anthony Yen, Christopher J. Progler, Microelectronic Engineering Industrial DesignPattern MakingDesignPrinted ElectronicsPattern Transfer	1998	29
Magnetotransport in multiple narrow silicon inversion channels opened electrostatically into a two-dimensional electron gas Philip F. Bagwell, Samuel L. Park, Anthony Yen, Physical review. B, Condensed matter Two-dimensional Electron GasMagnetismElectrical EngineeringSemiconductor TechnologyEngineering	1992	28
Ion beam deposition of <i>i</i> <i>n</i> <i>s</i> <i>i</i> <i>t</i> <i>u</i> superconducting Y-Ba-Cu-O films James D. Klein, Anthony Yen, Susan L. Clauson Applied Physics Letters Materials ScienceSuperconducting MaterialIon Beam DepositionEngineeringHigh-tc Superconductivity	1990	21

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