Hiroaki Kawata - Concepedia

Author

Hiroaki Kawata

Osaka Prefecture University

Also Known As

H Kawata, H. Kawata, Hiroaki KAWATA, Hiroaki Kawata, Hiroaki Kawata Hiroaki Kawata

245

Publications

1.5K

Citations

H-Index

121

Concepts

All Affiliations

Osaka Prefecture University Japan Science and Technology Agency

About

Hiroaki Kawata is an author at Osaka Prefecture University specializing in engineering, applied physics, and materials science.

Top Concepts

#	Concept	H-Index	Publications	Citations
1	Engineering	20	50	992
2	Applied Physics	18	38	730
3	Natural Sciences	8	8	134
4	Biomedical Engineering	5	5	111
5	Medicine	2	2	68

Hiroaki Kawata

Publications

1.1K

Citations

H-Index

Page 1

	Year	Citations
Optical projection lithography using lenses with numerical apertures greater than unity Hiroaki Kawata, James M. Carter, Anthony Yen, Microelectronic Engineering Optical DesignPhotonicsOptical MaterialsEngineeringOphthalmology	1989	55
Fabrication of 1∕4 wave plate by nanocasting lithography Takashi Yoshikawa, Takaaki Konishi, Masaki Nakajima, Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena EngineeringElectron-beam LithographyWave PlatePolymer NanocompositesMicro-optical Component	2005	46
Study of the spatial distribution of backscattered electrons from a gold target with a new Monte Carlo simulation Masaaki Yasuda, Hiroaki Kawata, Kenji Murata Journal of Applied Physics EngineeringNuclear PhysicsAu TargetElectron DiffractionElectron Optic	1995	41
Remote-collaboration system using mobile robot with camera and projector Tamotsu Machino, Sunao Iwaki, Hiroaki Kawata, Human-robot Collaborative AssemblyRemote OperationEngineeringField RoboticsIntelligent Systems	2006	37
Process-simulation system for UV-nanoimprint lithography Mayuko Shibata, Akira Horiba, Yoshinori Nagaoka, Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena Materials ScienceMaterials EngineeringUv ShrinkageEngineeringProcess-simulation System	2010	33
Site-specific nanopatterning of functional metallic and molecular arbitrary features in nanofluidic channels Yan Xu, Nobuhiro Matsumoto, Qian Wu, Lab on a Chip Functional MetallicNanoscale SystemEngineeringVersatile MethodNanomaterials	2015	33
Analysis of Charging Phenomena of Polymer Films on Silicon Substrates under Electron Beam Irradiation Masaaki Yasuda, Kosuke Morimoto, Yasuaki Kainuma, Japanese Journal of Applied Physics Materials ScienceConducting PolymerElectrical EngineeringEngineeringSemiconducting Polymer	2008	31
Computational study on polymer filling process in nanoimprint lithography Masaaki Yasuda, Kosei Araki, Akihiro Taga, Microelectronic Engineering Materials ScienceEngineeringNanoimprint LithographyBeam LithographyMicrofabrication	2011	30
Fabrication of Si mold with smooth side wall by new plasma etching process Hiroaki Kawata, Masaaki Yasuda, Yoshihiko Hirai Microelectronic Engineering Materials EngineeringMaterials ScienceSi MoldEngineeringMicrofabrication	2007	26
Effects of Mold Side Wall Profile on Demolding Characteristics Hiroaki Kawata, Kensuke Kubo, Yuuta Watanabe, Japanese Journal of Applied Physics Architectural DesignMaterials ScienceMold ControlSilicon MoldsEngineering	2010	26

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