Concepedia

Hiroaki Kawata

HK

56

Publications

1.1K

Citations

20

H-Index

1987

Active since

Affiliations

Osaka Prefecture University(Current)

Japan Science and Technology Agency

Hiroaki Kawata is an author at Osaka Prefecture University specializing in engineering, applied physics, and materials science.

Top concepts

EngineeringApplied PhysicsMaterial ScienceMicrofabrication3D PrintingNanolithographyNanotechnologyMicroelectronicsMechanical EngineeringPhysics

Publications per year

1987–2020

56

Publications

56

Optical projection lithography using lenses with numerical apertures greater than unity

Hiroaki Kawata, James M. Carter, Anthony Yen et al. · Microelectronic Engineering · 1989 · 55 citations

Optical Design, Photonics, Optical Materials +12

Fabrication of 1∕4 wave plate by nanocasting lithography

Takashi Yoshikawa, Takaaki Konishi, Masaki Nakajima et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2005 · 46 citations

Engineering, Electron-beam Lithography, Wave Plate +22

Study of the spatial distribution of backscattered electrons from a gold target with a new Monte Carlo simulation

Masaaki Yasuda, Hiroaki Kawata, Kenji Murata · Journal of Applied Physics · 1995 · 41 citations

Engineering, Nuclear Physics, Au Target +17

Remote-collaboration system using mobile robot with camera and projector

Tamotsu Machino, Sunao Iwaki, Hiroaki Kawata et al. · 2006 · 37 citations

Human-robot Collaborative Assembly, Remote Operation, Engineering +17

Process-simulation system for UV-nanoimprint lithography

Mayuko Shibata, Akira Horiba, Yoshinori Nagaoka et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2010 · 33 citations

Materials Science, Materials Engineering, Uv Shrinkage +15

Rows per page

1–5 of 56