Concepedia

Mayuko Shibata

MS

Statistics

Publications

3

Citations

108

H-Index

3

Active since

2001

Affiliations

Osaka Prefecture University(Current)

Mayuko Shibata is an author at Osaka Prefecture University specializing in engineering, nanolithography, and microfabrication.

Top concepts

Publications per year

2001–2010

3

Publications

3

Low-crosstalk 10-GHz-spaced 512-channel arrayed-waveguide grating multi/demultiplexer fabricated on a 4-in wafer

K. Takada, Makoto Abe, Mayuko Shibata et al. · IEEE Photonics Technology Letters · 2001 · 46 citations

, , +11

Process-simulation system for UV-nanoimprint lithography

Mayuko Shibata, Akira Horiba, Yoshinori Nagaoka et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2010 · 33 citations

, , +15

Pressure and resist thickness dependency of resist time evolutions profiles in nanoimprint lithography

Yoshihiko Hirai, Yuki ONISHI, Toshiaki Tanabe et al. · Microelectronic Engineering · 2008 · 29 citations

, , +12

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