Publication | Closed Access
Pressure and resist thickness dependency of resist time evolutions profiles in nanoimprint lithography
29
Citations
3
References
2008
Year
Materials ScienceMaterials EngineeringResist Thickness DependencyNanoimprint LithographyEngineeringMicrofabricationSpecific ResistanceElectron-beam LithographyBeam LithographyApplied PhysicsPrinted ElectronicsNanolithographyMicroelectronics3D PrintingNanolithography Method
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