Toshiaki Tanabe - Concepedia

Author

Toshiaki Tanabe

Also Known As

Toshiaki TANABE, Toshiaki Tanabe

Publications

102

Citations

H-Index

Concepts

All Affiliations

Toshiaki Tanabe is an author at Osaka Prefecture University specializing in microfabrication, engineering, and materials science.

#	Concept	H-Index	Publications	Citations
1	Engineering	4	4	83
2	Materials Science	4	4	83
3	Applied Physics	3	3	72
4	Materials Engineering	2	2	55
5	Natural Sciences	1	1	17

Toshiaki Tanabe

Publications

Citations

H-Index

Page 1

	Year	Citations
Pressure and resist thickness dependency of resist time evolutions profiles in nanoimprint lithography Yoshihiko Hirai, Yuki ONISHI, Toshiaki Tanabe, Microelectronic Engineering Materials ScienceMaterials EngineeringResist Thickness DependencyNanoimprint LithographyEngineering	2008	29
Time dependent analysis of the resist deformation in thermal nanoimprint Yoshihiko Hirai, Yuki ONISHI, Toshiaki Tanabe, Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena EngineeringMechanical EngineeringResist PressingThermal ConductivityBeam Lithography	2007	26
Numerical and Experimental Analysis of Intermittent Line-and-Space Patterns in Thermal Nanoimprint Yuki ONISHI, Yoshihiko Hirai, Hideki Takagi, Japanese Journal of Applied Physics Characteristic Polymer DeformationEngineeringMechanical EngineeringPattern TransferPolymer Nanocomposites	2008	17
Impact of De-molding Force on Exposure Dosage in UV-Nanoimprint Process Noriyoshi Fujii, Toshiaki Tanabe, Tamano Hirasawa, Journal of Photopolymer Science and Technology Materials ScienceMold Releasing ForcesEngineeringBeam LithographyMicrofabrication	2009	11

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