Concepedia

Toshiaki Tanabe

TT

Statistics

Publications

4

Citations

83

H-Index

4

Active since

2007

Affiliations

Osaka Prefecture University(Current)

Toshiaki Tanabe is an author at Osaka Prefecture University specializing in microfabrication, engineering, and materials science.

Top concepts

3D PrintingEngineeringMaterial ScienceMicrofabricationApplied PhysicsMechanical EngineeringMechanicsNanomaterialsNanotechnologyPolymer Processing

Publications per year

2007–2009

4

Publications

4

Pressure and resist thickness dependency of resist time evolutions profiles in nanoimprint lithography

Yoshihiko Hirai, Yuki ONISHI, Toshiaki Tanabe et al. · Microelectronic Engineering · 2008 · 29 citations

Materials Science, Materials Engineering, Resist Thickness Dependency +12

Time dependent analysis of the resist deformation in thermal nanoimprint

Yoshihiko Hirai, Yuki ONISHI, Toshiaki Tanabe et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2007 · 26 citations

Engineering, Mechanical Engineering, Resist Pressing +23

Numerical and Experimental Analysis of Intermittent Line-and-Space Patterns in Thermal Nanoimprint

Yuki ONISHI, Yoshihiko Hirai, Hideki Takagi et al. · Japanese Journal of Applied Physics · 2008 · 17 citations

Characteristic Polymer Deformation, Engineering, Mechanical Engineering +31

Impact of De-molding Force on Exposure Dosage in UV-Nanoimprint Process

Noriyoshi Fujii, Toshiaki Tanabe, Tamano Hirasawa et al. · Journal of Photopolymer Science and Technology · 2009 · 11 citations · Full text

Materials Science, Mold Releasing Forces, Engineering +13

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