Concepedia

Akira Horiba

AH

5

Publications

100

Citations

5

H-Index

2010

Active since

Affiliations

Osaka Prefecture University(Current)

Japan Science and Technology Agency

University of Hyogo

Akira Horiba is an author at Osaka Prefecture University specializing in engineering, 3d printing, and microfabrication.

Top concepts

Publications per year

2010–2012

5

Publications

5

Process-simulation system for UV-nanoimprint lithography

Mayuko Shibata, Akira Horiba, Yoshinori Nagaoka et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2010 · 33 citations

, , +15

Computational study on polymer filling process in nanoimprint lithography

Masaaki Yasuda, Kosei Araki, Akihiro Taga et al. · Microelectronic Engineering · 2011 · 30 citations

, , +5

Impact of Resist Shrinkage and Its Correction in Nanoimprint Lithography

Akira Horiba, Masaaki Yasuda, Hiroaki Kawata et al. · Japanese Journal of Applied Physics · 2012 · 14 citations

, , +17

Impact of Resist Shrinkage and Its Correction in Nanoimprint Lithography

Akira Horiba, Masaaki Yasuda, Hiroaki Kawata et al. · Japanese Journal of Applied Physics · 2012 · 13 citations

, , +17

Development of an experimental technique for testing rheological properties of ultrathin polymer films used in nanoimprint lithography

Dariusz M. Jarząbek, Zygmunt Rymuza, Akira Horiba et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2011 · 10 citations

, , +17

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