Statistics
Publications
17
Citations
482
H-Index
14
Active since
1960
Y. Ku is an author at Massachusetts Institute of Technology specializing in engineering, applied physics, and materials science.
Publications per year
1960–2022
17
17
Shien-Yang Wu, M.C. Chiang, C.Y. Lin et al. · 2022 International Electron Devices Meeting (IEDM) · 2022 · 49 citations
Low-power Electronics, Electrical Engineering, Cmos Platform Technology +15
Use of a pi-phase shifting x-ray mask to increase the intensity slope at feature edges
Y. Ku, Erik H. Anderson, Mark L. Schattenburg et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1988 · 32 citations
Engineering, Electron-beam Lithography, X-ray Fluorescence +21
Magdi M. Mossoba, J. K. G. Kramer, Jan Fritsche et al. · Journal of the American Oil Chemists Society · 2001 · 23 citations
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