Concepedia

J. S. Huh

JS

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Publications

1

Citations

14

H-Index

1

Active since

1991

Affiliations

Massachusetts Institute of Technology(Current)

J. S. Huh is an author at Massachusetts Institute of Technology specializing in microfabrication, mass spectrometry, and applied physics.

Top concepts

Publications per year

1991–1991

1

Publications

1

Focused ion beam lithography

J. S. Huh, M. I. Shepard, J. Melngailis · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1991 · 14 citations

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