Ion bombardment of resists

Ion-surface interactions in plasma etching

J. W. Coburn, Harold F. Winters, T. J. Chuang · Journal of Applied Physics · 1977 · 216 citations

Natural Sciences, Chemistry, Materials Science +17

High-resolution, ion-beam processes for microstructure fabrication

R. L. Seliger, R. L. Kubena, R. D. Olney et al. · Journal of Vacuum Science and Technology · 1979 · 156 citations

Engineering, Materials Engineering, Materials Science +15

Polymeric Electron Beam Resists

Hao-Yu Ku, L. C. Scala · Journal of The Electrochemical Society · 1969 · 78 citations

Natural Sciences, Materials Engineering, Materials Science +13

Ion Beam Exposure of Resist Materials

Masanori Komuro, Nobufumi Atoda, Hisazo Kawakatsu · Journal of The Electrochemical Society · 1979 · 78 citations

Natural Sciences, Materials Engineering, Materials Science +16

High Dose Ion Implantation into Photoresist

Yuji Okuyama, Takashi Hashimoto, T. Koguchi · Journal of The Electrochemical Society · 1978 · 76 citations

Engineering, Materials Engineering, Materials Science +14