Concepedia

T. J. Chuang

TJ

17

Publications

1.3K

Citations

14

H-Index

1974

Active since

Affiliations

IBM (United States)(Current)

National Tsing Hua University

Institute of Atomic and Molecular Sciences, Academia Sinica

T. J. Chuang is an author at IBM (United States) specializing in engineering, applied physics, and chemistry.

Top concepts

EngineeringApplied PhysicsChemistryPhysicsSurface ScienceLaser ApplicationsMaterial ScienceOptical PropertiesLaser-surface InteractionsNatural Sciences

Publications per year

1974–2019

17

Publications

17

Surface processes in plasma-assisted etching environments

Harold F. Winters, J. W. Coburn, T. J. Chuang · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1983 · 266 citations

Engineering, Microfabrication, Materials Fabrication +15

Chemical sputtering of fluorinated silicon

Yung-Yi Tu, T. J. Chuang, Harold F. Winters · Physical review. B, Condensed matter · 1981 · 225 citations

Materials Science, Materials Engineering, Chemical Engineering +15

Ion-surface interactions in plasma etching

J. W. Coburn, Harold F. Winters, T. J. Chuang · Journal of Applied Physics · 1977 · 215 citations

Materials Science, Ion Implantation, Engineering +12

Multiple photon excited SF6 interaction with silicon surfaces

T. J. Chuang · The Journal of Chemical Physics · 1981 · 113 citations

Optical Materials, Engineering, Multiple Photon +21

Picosecond studies of the excited charge-transfer interactions in anthracene-(CH2)3-N,N-dimethylaniline systems

T. J. Chuang, Robert J. Cox, Kenneth B. Eisenthal · Journal of the American Chemical Society · 1974 · 71 citations

Engineering, Chemical Analysis, Altmetric Attention Score +18

Rows per page

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