Concepedia

Cleaning technology for EUV multilayer mirror using atomic hydrogen generated with hot wire

Kumi Motai, Hiroaki Oizumi, Shinji Miyagaki, Iwao Nishiyama, Akira Izumi, Tomoya Ueno, A. Namiki

Thin Solid Films · 2007 · 36 citations · 11 references

DOI

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References

11

Direct detection of H atoms in the catalytic chemical vapor deposition of the SiH4/H2 system

Hironobu Umemoto, Kentaro Ohara, Daisuke Morita et al. · Journal of Applied Physics · 2002 · 159 citations · Full text

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Vacuum ultraviolet absorption spectroscopy employing a microdiacharge hollow-cathode lamp for absolute density measurements of hydrogen atoms in reactive plasmas

Seigou Takashima, Masaru Hori, Toshio Goto et al. · Applied Physics Letters · 1999 · 131 citations

, , +16

Design and performance of capping layers for extreme-ultraviolet multilayer mirrors

S. Bajt, Henry N. Chapman, Nhan Nguyen et al. · Applied Optics · 2003 · 85 citations

, , +16

Reduction of oxide layer on Ru surface by atomic-hydrogen treatment

Iwao Nishiyama, Hiroaki Oizumi, Kumi Motai et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2005 · 58 citations

, , +17

Radio-frequency discharge cleaning of silicon-capped Mo/Si multilayer extreme ultraviolet optics

Samuel Graham, Charles A. Steinhaus, Miles Clift et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2002 · 40 citations

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