Cleaning technology for EUV multilayer mirror using atomic hydrogen generated with hot wire - Concepedia

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Cleaning technology for EUV multilayer mirror using atomic hydrogen generated with hot wire

36

Citations

11

References

2007

Year

Kumi Motai, Hiroaki Oizumi, Shinji Miyagaki, Iwao Nishiyama, Akira Izumi, Tomoya Ueno, A. Namiki

Thin Solid Films

Materials ScienceElectrical EngineeringChemical EngineeringEuv Multilayer MirrorEngineeringCleaning TechnologyHot WireHydrogen

References

	Year	Citations

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