Akira Izumi

Statistics

Publications

Citations

827

H-Index

Active since

1988

Affiliations

Japan Advanced Institute of Science and Technology(Current)

Kyushu Institute of Technology

Association of Super-Advanced Electronics

Industrial Research Institute of Ishikawa

Japan Science and Technology Agency

Akira Izumi is an author at Japan Advanced Institute of Science and Technology specializing in materials science, materials engineering, and natural sciences.

ORCID

Publications per year

1988–2023

Publications

Low-temperature nitridation of silicon surface using NH3-decomposed species in a catalytic chemical vapor deposition system

Akira Izumi, Hideki Matsumura · Applied Physics Letters · 1997 · 46 citations

Natural Sciences, Materials Engineering, Materials Science +17

Deposition of SiCN films using organic liquid materials by HWCVD method

Akira Izumi, Koshi Oda · Thin Solid Films · 2005 · 45 citations

Natural Sciences, Materials Engineering, Materials Science +16

Plasma and fluorocarbon-gas free Si dry etching process using a Cat-CVD system

Akira Izumi, Hidekazu Sato, Shingi Hashioka et al. · Microelectronic Engineering · 2000 · 44 citations

Natural Sciences, Materials Engineering, Materials Science +14

Recent progress of Cat-CVD research in Japan—bridging between the first and second Cat-CVD conferences

Hideki Matsumura, Hironobu Umemoto, Akira Izumi et al. · Thin Solid Films · 2003 · 40 citations

Natural Sciences, Animal Sciences, Clinical Informatics +1

Evaluation of corrosion resistance of SiCN films deposited by HWCVD using organic liquid materials

T. Nakayamada, Kazuya Matsuo, Yoshihito Hayashi et al. · Thin Solid Films · 2007 · 37 citations

Natural Sciences, Materials Engineering, Materials Science +15

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