Hironobu Umemoto

Direct detection of H atoms in the catalytic chemical vapor deposition of the SiH4/H2 system

Hironobu Umemoto, Kentaro Ohara, Daisuke Morita et al. · Journal of Applied Physics · 2002 · 159 citations

Engineering, Direct Detection, Chemistry +19

Reactions of N(2 2D) and N(2 2P) with H2 and D2

Teruaki Suzuki, Yoshitaka Shihira, Tohru Sato et al. · Journal of the Chemical Society Faraday Transactions · 1993 · 110 citations

Electronic Excited State, Excited State Property, Engineering +14

Identification of Si and SiH in catalytic chemical vapor deposition of SiH4 by laser induced fluorescence spectroscopy

Yoshitaka Nozaki, Koichi Kongo, T. Miyazaki et al. · Journal of Applied Physics · 2000 · 93 citations

Engineering, Chemistry, Silicon On Insulator +16

Nascent rotational and vibrational state distributions of NH(X 3Σ−) and ND(X 3Σ−) produced in the reactions of N(2 2D) with H2 and D2

Hironobu Umemoto, Takashi Asai, Yuki Kimura · The Journal of Chemical Physics · 1997 · 91 citations

Engineering, Nascent Rotational, Chemistry +20

Nascent internal energy distributions of MgH(MgD) produced in the reaction of Mg(3<i>s</i>3<i>p</i>1<i>P</i>1) with H2(D2)

W. H. Breckenridge, Hironobu Umemoto · The Journal of Chemical Physics · 1984 · 78 citations

Chemical Thermodynamics, Engineering, Physics +12