Concepedia

Yoshitaka Nozaki

YN

4

Publications

331

Citations

4

H-Index

2000

Active since

Affiliations

Japan Advanced Institute of Science and Technology(Current)

Yoshitaka Nozaki is an author at Japan Advanced Institute of Science and Technology specializing in chemical engineering, hydrogen, and chemistry.

Top concepts

HydrogenChemistryEngineeringChemical EngineeringCatalysisApplied PhysicsChemical KineticsPhysical ChemistrySurface ScienceSpectroscopy

Publications per year

2000–2002

4

Publications

4

Direct detection of H atoms in the catalytic chemical vapor deposition of the SiH4/H2 system

Hironobu Umemoto, Kentaro Ohara, Daisuke Morita et al. · Journal of Applied Physics · 2002 · 159 citations

Engineering, Direct Detection, Chemistry +19

Identification of Si and SiH in catalytic chemical vapor deposition of SiH4 by laser induced fluorescence spectroscopy

Yoshitaka Nozaki, Koichi Kongo, T. Miyazaki et al. · Journal of Applied Physics · 2000 · 93 citations

Engineering, Chemistry, Silicon On Insulator +16

Identification and gas phase kinetics of radical species in Cat-CVD processes of SiH4

Yoshitaka Nozaki, Makiko Kitazoe, Katsuhiko Horii et al. · Thin Solid Films · 2001 · 54 citations

Cat-cvd Processes, Chemical Engineering, Radical Emission +9

Effects of atomic hydrogen in gas phase on a-Si:H and poly-Si growth by catalytic CVD

Hironobu Umemoto, Yoshitaka Nozaki, Makiko Kitazoe et al. · Journal of Non-Crystalline Solids · 2002 · 25 citations

Chemical Engineering, Engineering, Hydrogen Transition +8

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