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Effects of atomic hydrogen in gas phase on a-Si:H and poly-Si growth by catalytic CVD

DOI

25

Citations

16

References

2002

Year

Hironobu Umemoto, Yoshitaka Nozaki, Makiko Kitazoe, Katsuhiko Horii, Kentaro Ohara, Daisuke Morita, Kenji Uchida, Yoriko Ishibashi, Manabu Komoda, Koji Kamesaki,
Journal of Non-Crystalline Solids

References

YearCitations

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