Makiko Kitazoe

Statistics

Publications

Citations

210

H-Index

Active since

2000

Affiliations

Japan Advanced Institute of Science and Technology(Current)

Ulvac (Japan)

Makiko Kitazoe is an author at Japan Advanced Institute of Science and Technology specializing in materials science, natural sciences, and chemical vapor deposition.

Publications per year

2000–2005

Publications

Identification of Si and SiH in catalytic chemical vapor deposition of SiH4 by laser induced fluorescence spectroscopy

Yoshitaka Nozaki, Koichi Kongo, T. Miyazaki et al. · Journal of Applied Physics · 2000 · 93 citations · Full text

Natural Sciences, Chemistry, Materials Science +15

Identification and gas phase kinetics of radical species in Cat-CVD processes of SiH4

Yoshitaka Nozaki, Makiko Kitazoe, Katsuhiko Horii et al. · Thin Solid Films · 2001 · 54 citations

Natural Sciences, Chemistry, Materials Science +16

Effects of atomic hydrogen in gas phase on a-Si:H and poly-Si growth by catalytic CVD

Hironobu Umemoto, Yoshitaka Nozaki, Makiko Kitazoe et al. · Journal of Non-Crystalline Solids · 2002 · 25 citations

Natural Sciences, Materials Engineering, Materials Science +12

Coverage properties of silicon nitride film prepared by the Cat-CVD method

S. Osono, Y. Uchiyama, Makiko Kitazoe et al. · Thin Solid Films · 2003 · 24 citations

Natural Sciences, Materials Engineering, Materials Science +16

Development of catalytic chemical vapor deposition apparatus for large size substrates

S. Osono, Makiko Kitazoe, Hideo Tsuboi et al. · Thin Solid Films · 2005 · 14 citations

Natural Sciences, Materials Engineering, Materials Science +11

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