Makiko Kitazoe

Identification of Si and SiH in catalytic chemical vapor deposition of SiH4 by laser induced fluorescence spectroscopy

Yoshitaka Nozaki, Koichi Kongo, T. Miyazaki et al. · Journal of Applied Physics · 2000 · 93 citations

Engineering, Chemistry, Silicon On Insulator +16

Identification and gas phase kinetics of radical species in Cat-CVD processes of SiH4

Yoshitaka Nozaki, Makiko Kitazoe, Katsuhiko Horii et al. · Thin Solid Films · 2001 · 54 citations

Cat-cvd Processes, Chemical Engineering, Radical Emission +9

Effects of atomic hydrogen in gas phase on a-Si:H and poly-Si growth by catalytic CVD

Hironobu Umemoto, Yoshitaka Nozaki, Makiko Kitazoe et al. · Journal of Non-Crystalline Solids · 2002 · 25 citations

Chemical Engineering, Engineering, Hydrogen Transition +8

Coverage properties of silicon nitride film prepared by the Cat-CVD method

S. Osono, Y. Uchiyama, Makiko Kitazoe et al. · Thin Solid Films · 2003 · 24 citations

Materials Engineering, Materials Science, Engineering +8

Development of catalytic chemical vapor deposition apparatus for large size substrates

S. Osono, Makiko Kitazoe, Hideo Tsuboi et al. · Thin Solid Films · 2005 · 14 citations

Materials Science, Chemical Engineering, Catalytic Material +10