Development of catalytic chemical vapor deposition apparatus for large size substrates

Direct detection of H atoms in the catalytic chemical vapor deposition of the SiH4/H2 system

Hironobu Umemoto, Kentaro Ohara, Daisuke Morita et al. · Journal of Applied Physics · 2002 · 159 citations

Engineering, Direct Detection, Chemistry +19

Summary of research in NEDO Cat-CVD project in Japan

Hideki Matsumura · Thin Solid Films · 2001 · 93 citations

Animal Study, Nedo Cat-cvd Project

Recent progress of Cat-CVD research in Japan—bridging between the first and second Cat-CVD conferences

Hideki Matsumura, Hironobu Umemoto, Akira Izumi et al. · Thin Solid Films · 2003 · 40 citations

Second Cat-cvd Conferences, Biostatistics, Recent Progress +3

Preparation of large uniform amorphous silicon films by VHF-PECVD using a ladder-shaped antenna

Yoshiaki Takeuchi, Yoshikazu Nawata, Kazuhiko Ogawa et al. · Thin Solid Films · 2001 · 30 citations

Materials Engineering, Materials Science, Electrical Engineering +8

Development of Cat-CVD apparatus for 1-m-size large-area deposition

Keiji Ishibashi, Minoru Karasawa, Ge Xu et al. · Thin Solid Films · 2003 · 30 citations

Engineering, Microfabrication, Applied Physics +4