Publication | Closed Access
Development of catalytic chemical vapor deposition apparatus for large size substrates
14
Citations
6
References
2005
Year
Materials ScienceChemical EngineeringCatalytic MaterialEngineeringMaterials FabricationSurface ScienceDirected Energy DepositionCatalysisChemistryChemical DepositionChemical Vapor DepositionLarge Size SubstratesThin Film Processing
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