Concepedia

S. Osono

SO

2

Publications

38

Citations

2

H-Index

2003

Active since

Affiliations

Ulvac (Japan)(Current)

S. Osono is an author at Ulvac (Japan) specializing in engineering, materials science, and chemical engineering.

Top concepts

EngineeringMaterial ScienceCatalysisChemistryApplied PhysicsSurface ScienceChemical EngineeringMaterials EngineeringMaterials Fabrication

Publications per year

2003–2005

2

Publications

2

Coverage properties of silicon nitride film prepared by the Cat-CVD method

S. Osono, Y. Uchiyama, Makiko Kitazoe et al. · Thin Solid Films · 2003 · 24 citations

Materials Engineering, Materials Science, Engineering +8

Development of catalytic chemical vapor deposition apparatus for large size substrates

S. Osono, Makiko Kitazoe, Hideo Tsuboi et al. · Thin Solid Films · 2005 · 14 citations

Materials Science, Chemical Engineering, Catalytic Material +10

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