Concepedia

Author

S. Osono

Ulvac (Japan)

Also Known As

S. Osono, Shuuji Osono

3

Publications

42

Citations

3

H-Index

9

Concepts

All Affiliations

Ulvac (Japan)
SO

About

S. Osono is an author at Ulvac (Japan) specializing in engineering, materials science, and chemical engineering.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

2

2

38

2

Applied Physics

1

1

24

3

Chemical Engineering

1

1

14

4

Chemistry

1

1

14

5

Materials Engineering

1

1

24

S. Osono

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2

Publications

38

Citations

2

H-Index

YearCitations

Coverage properties of silicon nitride film prepared by the Cat-CVD method

S. Osono, Y. Uchiyama, Makiko Kitazoe,

Thin Solid Films

2003

24

Development of catalytic chemical vapor deposition apparatus for large size substrates

S. Osono, Makiko Kitazoe, Hideo Tsuboi,

Thin Solid Films

2005

14

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