6
Publications
145
Citations
6
H-Index
1997
Active since
Affiliations
Y. Uchiyama is an author at Fujitsu (Japan) specializing in engineering, applied physics, and materials science.
Top concepts
EngineeringApplied PhysicsMaterial SciencePhysicsSurface ScienceMicroelectronicsMaterials EngineeringPhotonicsThin FilmsQuantum Dots
Publications per year
1997–2021
6
6
Coverage properties of silicon nitride film prepared by the Cat-CVD method
S. Osono, Y. Uchiyama, Makiko Kitazoe et al. · Thin Solid Films · 2003 · 24 citations
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1–5 of 6