Hideki Matsumura

Statistics

Publications

146

Citations

4.9K

H-Index

Active since

1972

Affiliations

Japan Advanced Institute of Science and Technology(Current)

Japan Science and Technology Agency

Hiroshima University

Tokyo Institute of Technology

Hideki Matsumura is an author at Japan Advanced Institute of Science and Technology specializing in materials science, natural sciences, and materials engineering.

Publications per year

1972–2017

146

Publications

146

Formation of Silicon-Based Thin Films Prepared by Catalytic Chemical Vapor Deposition (Cat-CVD) Method

Hideki Matsumura · Japanese Journal of Applied Physics · 1998 · 230 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Theoretical Considerations on Lateral Spread of Implanted Ions

Seijiro Furukawa, Hideki Matsumura, Hiroshi Ishiwara · Japanese Journal of Applied Physics · 1972 · 204 citations

Engineering, Materials Science, Electronic Materials +7

Catalytic Chemical Vapor Deposition (CTC–CVD) Method Producing High Quality Hydrogenated Amorphous Silicon

Hideki Matsumura · Japanese Journal of Applied Physics · 1986 · 189 citations

Natural Sciences, Materials Engineering, Materials Science +17

Direct detection of H atoms in the catalytic chemical vapor deposition of the SiH4/H2 system

Hironobu Umemoto, Kentaro Ohara, Daisuke Morita et al. · Journal of Applied Physics · 2002 · 159 citations · Full text

Natural Sciences, Chemical Engineering, Chemistry +12

Amorphous silicon produced by a new thermal chemical vapor deposition method using intermediate species SiF2

Hideki Matsumura, Hiroyuki Tachibana · Applied Physics Letters · 1985 · 134 citations

Natural Sciences, Materials Engineering, Materials Science +17

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