Concepedia

Publication | Closed Access

Coverage properties of silicon nitride film prepared by the Cat-CVD method

DOI

24

Citations

12

References

2003

Year

S. Osono, Y. Uchiyama, Makiko Kitazoe, Kazuya Saito, Masahiro Hayama, Atsushi Masuda, Akira Izumi, Hiroyoshi Matsumura
Thin Solid Films

References

YearCitations

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