Statistics
Publications
12
Citations
317
H-Index
11
Active since
1990
Hideo Tsuboi is an author at Ulvac (Japan) specializing in natural sciences, plasma physics, and physics.
Publications per year
1990–2021
12
12
Etching yield of SiO2 irradiated by F+, CFx+ (x=1,2,3) ion with energies from 250 to 2000 eV
Kazuhiro Karahashi, Ken-ichi Yanai, Kenji Ishikawa et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2004 · 81 citations
Natural Sciences, Materials Engineering, Materials Science +17
Kenji Ishikawa, Kazuhiro Karahashi, Hideo Tsuboi et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2003 · 45 citations
Natural Sciences, Materials Engineering, Materials Science +17
Ahmad Hafidul Ahkam, Aditya Ragil Suharto, Yoga Dwi Jatmiko et al. · Research in Pharmaceutical Sciences · 2021 · 24 citations · Full text
Medicine, Oncology, Pharmacology +16
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