Ken-ichi Yanai

Statistics

Publications

Citations

209

H-Index

Active since

1981

Affiliations

Association of Super-Advanced Electronics(Current)

Ken-ichi Yanai is an author at Association of Super-Advanced Electronics specializing in materials science, natural sciences, and materials engineering.

Publications per year

1981–2005

Publications

Etching yield of SiO2 irradiated by F+, CFx+ (x=1,2,3) ion with energies from 250 to 2000 eV

Kazuhiro Karahashi, Ken-ichi Yanai, Kenji Ishikawa et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2004 · 81 citations

Natural Sciences, Materials Engineering, Materials Science +17

Mass-analyzed CFx+ (x=1,2,3) ion beam study on selectivity of SiO2-to-SiN etching and a-C:F film deposition

Ken-ichi Yanai, Kazuhiro Karahashi, Kenji Ishikawa et al. · Journal of Applied Physics · 2005 · 70 citations

Natural Sciences, Materials Engineering, Materials Science +17

Transitional change to amorphous fluorinated carbon film deposition under energetic irradiation of mass-analyzed carbon monofluoride ions on silicon dioxide surfaces

Kenji Ishikawa, Kazuhiro Karahashi, Hideo Tsuboi et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2003 · 45 citations

Natural Sciences, Materials Engineering, Materials Science +17

Temperature Dependence of NMR of Magnetite at about 10 K

Ken-ichi Yanai, Moriji Mizoguchi, Shūichi Iida · Journal of the Physical Society of Japan · 1981 · 13 citations

Natural Sciences, Materials Science, Magnetic Materials +16

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