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Masafumi Tanabe

MT

1

Publications

53

Citations

1

H-Index

1995

Active since

Affiliations

Ulvac (Japan)(Current)

Masafumi Tanabe is an author at Ulvac (Japan) specializing in engineering, plasma science, and magnetohydrodynamics.

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Publications per year

1995–1995

1

Publications

1

Usefulness of Magnetic Neutral Loop Discharge Plasma in Plasma Processing

Hideo Tsuboi, Masahiro Itoh, Masafumi Tanabe et al. · Japanese Journal of Applied Physics · 1995 · 53 citations

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