Concepedia

Publication | Closed Access

Preparation of large uniform amorphous silicon films by VHF-PECVD using a ladder-shaped antenna

DOI

30

Citations

9

References

2001

Year

Yoshiaki Takeuchi, Yoshikazu Nawata, Kazuhiko Ogawa, Akira Serizawa, Yasuhiro Yamauchi, Masayoshi Murata
Thin Solid Films

References

YearCitations

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