Concepedia

Author

Koji Kamesaki

Japan Advanced Institute of Science and Technology

Also Known As

Koji Kamesaki

9

Publications

110

Citations

6

H-Index

18

Concepts

All Affiliations

Japan Advanced Institute of Science and Technology
KK

About

Koji Kamesaki is an author at Japan Advanced Institute of Science and Technology specializing in engineering, chemical engineering, and materials science.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

5

5

97

2

Chemical Engineering

4

4

85

3

Applied Physics

3

3

73

4

Chemistry

2

2

35

5

Electrical Engineering

1

1

12

Koji Kamesaki

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5

Publications

97

Citations

5

H-Index

YearCitations

Catalytic Chemical Sputtering: A Novel Method for Obtaining Large-Grain Polycrystalline Silicon

Hideki Matsumura, Koji Kamesaki, Atsushi Masuda,

Japanese Journal of Applied Physics

2001

36

Effects of atomic hydrogen in gas phase on a-Si:H and poly-Si growth by catalytic CVD

Hironobu Umemoto, Yoshitaka Nozaki, Makiko Kitazoe,

Journal of Non-Crystalline Solids

2002

25

Proposal of catalytic chemical sputtering method and its application to prepare large grain size poly-Si

Koji Kamesaki, Atsushi Masuda, Akira Izumi,

Thin Solid Films

2001

14

Improvement in Antimony-Doped Ultrashallow Junction Sheet Resistance by Dopant Pileup Reduction at the SiO<sub>2</sub>/Si Interface

Kentaro Shibahara, Kazuhiko Egusa, Koji Kamesaki,

Japanese Journal of Applied Physics

2000

12

In situ chamber cleaning using atomic H in catalytic-CVD apparatus for mass production of a-Si:H solar cells

Atsushi Masuda, Yoriko Ishibashi, Kenji Uchida,

Solar Energy Materials and Solar Cells

2002

10

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