Publication | Closed Access
Proposal of catalytic chemical sputtering method and its application to prepare large grain size poly-Si
14
Citations
2
References
2001
Year
Materials EngineeringMaterials ScienceChemical EngineeringMolecular SieveEngineeringMicrofabricationMaterials FabricationTarget FabricationCatalytic ChemicalMicroelectronics
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