Kazuhiko Egusa - Concepedia

Author

Kazuhiko Egusa

Also Known As

K. Egusa, Kazuhiko Egusa

Publications

Citations

H-Index

Concepts

All Affiliations

Kazuhiko Egusa is an author at Hiroshima University specializing in applied physics, engineering, and materials engineering.

#	Concept	H-Index	Publications	Citations
1	Engineering	2	2	29
2	Applied Physics	2	2	29
3	Materials Engineering	2	2	29
4	Materials Science	2	2	29
5	Electrical Engineering	1	1	12

Kazuhiko Egusa

Publications

Citations

H-Index

Page 1

	Year	Citations
Dopant Loss Origins of Low Energy Implanted Arsenic and Antimony for Ultra Shallow Junction Formation Kentaro Shibahara, Hiroaki Furumoto, Kazuhiko Egusa, MRS Proceedings Materials EngineeringMaterials ScienceIon ImplantationEngineeringDopant Loss Origins	1998	17
Improvement in Antimony-Doped Ultrashallow Junction Sheet Resistance by Dopant Pileup Reduction at the SiO<sub>2</sub>/Si Interface Kentaro Shibahara, Kazuhiko Egusa, Koji Kamesaki, Japanese Journal of Applied Physics Materials ScienceMaterials EngineeringElectrical EngineeringSemiconductor TechnologyEngineering	2000	12

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