Statistics
Publications
5
Citations
128
H-Index
5
Active since
2002
Affiliations
Charles A. Steinhaus is an author at Sandia National Laboratories California specializing in optical materials, materials science, and materials engineering.
Publications per year
2002–2004
5
5
Radio-frequency discharge cleaning of silicon-capped Mo/Si multilayer extreme ultraviolet optics
Samuel Graham, Charles A. Steinhaus, Miles Clift et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2002 · 40 citations
Natural Sciences, Materials Engineering, Materials Science +17
Radiation-induced protective carbon coating for extreme ultraviolet optics
Leonard E. Klebanoff, W. Miles Clift, Marcin Malinowski et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2002 · 27 citations
Natural Sciences, Materials Engineering, Materials Science +17
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