48
Publications
2K
Citations
23
H-Index
1987
Active since
Leonard E. Klebanoff is an author at Sandia National Laboratories California specializing in engineering, chemical engineering, and applied physics.
Top concepts
EngineeringApplied PhysicsChemical EngineeringMaterial ScienceChemistryHydrogenSurface ScienceOptoelectronicsOptical MaterialsHydrogen Transport
Publications per year
1987–2025
48
48
Modeling radiation-induced carbon contamination of extreme ultraviolet optics
Jeromy T. Hollenshead, Leonard E. Klebanoff · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2006 · 121 citations
Ultraviolet Light, Short Wavelength Optic, Optical Materials +14
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1–5 of 48