Michael E. Malinowski

Design and performance of capping layers for extreme-ultraviolet multilayer mirrors

S. Bajt, Henry N. Chapman, Nhan Nguyen et al. · Applied Optics · 2003 · 85 citations

Natural Sciences, Materials Engineering, Materials Science +16

Design and performance of capping layers for EUV multilayer mirrors

S. Bajt, Henry N. Chapman, Nhan Nguyen et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 41 citations

Natural Sciences, Materials Engineering, Materials Science +17

<title>Use of molecular oxygen to reduce EUV-induced carbon contamination of optics</title>

Michael E. Malinowski, Philip A. Grunow, Chip Steinhaus et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 30 citations

Natural Sciences, Materials Engineering, Materials Science +13

<title>First environmental data from the EUV engineering test stand</title>

Leonard E. Klebanoff, Michael E. Malinowski, Philip A. Grunow et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 23 citations

Engineering, Environmental Engineering, Materials Engineering +10

Controlling contamination in Mo/Si multilayer mirrors by Si surface capping modifications

Michael E. Malinowski, Chip Steinhaus, W. Miles Clift et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2002 · 23 citations

Natural Sciences, Materials Engineering, Materials Science +17