Concepedia

Chip Steinhaus

CS

Statistics

Publications

4

Citations

90

H-Index

4

Active since

2001

Affiliations

Sandia National Laboratories California(Current)

Chip Steinhaus is an author at Sandia National Laboratories California specializing in materials engineering, materials science, and surface science.

Publications per year

2001–2002

4

Publications

4

<title>Use of molecular oxygen to reduce EUV-induced carbon contamination of optics</title>

Michael E. Malinowski, Philip A. Grunow, Chip Steinhaus et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 30 citations

Natural Sciences, Materials Engineering, Materials Science +13

<title>First environmental data from the EUV engineering test stand</title>

Leonard E. Klebanoff, Michael E. Malinowski, Philip A. Grunow et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 23 citations

Engineering, Environmental Engineering, Materials Engineering +10

Controlling contamination in Mo/Si multilayer mirrors by Si surface capping modifications

Michael E. Malinowski, Chip Steinhaus, W. Miles Clift et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2002 · 23 citations

Natural Sciences, Materials Engineering, Materials Science +17

Studies of EUV contamination mitigation

S. Graham, Michael E. Malinowski, Chip Steinhaus et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2002 · 14 citations

Engineering, Materials Engineering, Materials Science +15

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