10 kV, 123 mΩ-cm/sup 2/4H-SiC power DMOSFETs

Sei‐Hyung Ryu, Sumi Krishnaswami, Michael O’Loughlin, Jim Richmond, Anant Agarwal, John W. Palmour, Allen R. Hefner

2004 · 18 citations · 5 references

Concepts

Abstract

Power MOSFETs in 4H-SiC are very attractive for high voltage switching applications because of their low specific on-resistances and fast, temperature independent switching characteristics. We present our latest results in 10 kV 4H-SiC DMOSFET development - a specific on-resistance of 123 m/spl Omega//spl middot/cm/sup 2/ is demonstrated, which is a 42% reduction in specific on-resistance. This is the lowest specific on-resistance value ever reported for 10 kV class majority carrier switches.

References

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