M.S. Liang

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Publications

Citations

1.3K

H-Index

Active since

1983

Affiliations

Taiwan Semiconductor Manufacturing Company (Taiwan)(Current)

National Cheng Kung University

National Yang Ming Chiao Tung University

University of California, Berkeley

Taiwan Semiconductor Manufacturing Company (China)

M.S. Liang is an author at Taiwan Semiconductor Manufacturing Company (Taiwan) specializing in engineering, semiconductor devices, and electrical engineering.

ORCID

Publications per year

1983–2022

Publications

Stress memorization technique (SMT) by selectively strained-nitride capping for sub-65nm high-performance strained-Si device application

Chien‐Hao Chen, T.L. Lee, Tuo‐Hung Hou et al. · 2004 · 115 citations

Engineering, Electrical Engineering, Materials Science +14

Virtual metrology: a solution for wafer to wafer advanced process control

P. T. Chen, S.Y. Wu, Junshien Lin et al. · 2005 · 99 citations

Engineering, Industrial Engineering, Manufacturing Engineering +10

A physical model for the hysteresis phenomenon of the ultrathin ZrO2 film

Jer‐Chyi Wang, S. H. Chiao, Chee-Leong Lee et al. · Journal of Applied Physics · 2002 · 90 citations

Natural Sciences, Materials Engineering, Materials Science +17

Highly manufacturable 7nm FinFET technology featuring EUV lithography for low power and high performance applications

Daewon Ha, Chul‐Ju Yang, Juyul Lee et al. · 2017 · 70 citations

Engineering, Computer Engineering, Electrical Engineering +16

A 3nm CMOS FinFlex™ Platform Technology with Enhanced Power Efficiency and Performance for Mobile SoC and High Performance Computing Applications

Shien-Yang Wu, M.C. Chiang, C.Y. Lin et al. · 2022 International Electron Devices Meeting (IEDM) · 2022 · 56 citations

Engineering, Electrical Engineering, High-performance Computing +17

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