M.S. Liang

Stress memorization technique (SMT) by selectively strained-nitride capping for sub-65nm high-performance strained-Si device application

Chien‐Hao Chen, T.L. Lee, Tuo‐Hung Hou et al. · 2004 · 115 citations

Engineering, Silicon On Insulator, Stress Modulation Effect +16

Virtual metrology: a solution for wafer to wafer advanced process control

P. T. Chen, S.Y. Wu, Junshien Lin et al. · 2005 · 97 citations

Virtual Manufacturing, Engineering, Computer Architecture +19

A physical model for the hysteresis phenomenon of the ultrathin ZrO2 film

Jer‐Chyi Wang, S. H. Chiao, Chee-Leong Lee et al. · Journal of Applied Physics · 2002 · 90 citations

Zirconium Oxide, Engineering, Zirconium Dielectrics +18

Highly manufacturable 7nm FinFET technology featuring EUV lithography for low power and high performance applications

Daewon Ha, Chul‐Ju Yang, Juyul Lee et al. · 2017 · 70 citations

Low Power, Electrical Engineering, Engineering +11

Characterization and modeling of edge direct tunneling (EDT) leakage in ultrathin gate oxide MOSFETs

Kaisen Yang, H.T. Huang, M.J. Chen et al. · IEEE Transactions on Electron Devices · 2001 · 54 citations

Electrical Engineering, Engineering, Drain Extension +10